Development of diamond-like carbon films for large area microelectronic applications using ECR-CVD.
Yoon, Soon Fatt.
Date of Issue2001
School of Electrical and Electronic Engineering
In this project, the ECR-CVD technique has been used to deposit amorphous and diamond-like carbon films from a mixture of hydrogen and methane, and for the characterisation of optical, structural and mechanical properties of the films, the following analytical techniques has been employed.
DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
Nanyang Technological University