Studies on diamond and diamond-like carbon films
Tan, Hong Siang
Tay, Beng Kang
Date of Issue2001
School of Electrical and Electronic Engineering
In this study, DLC films were deposited by a Magneticlaly Enhanced Plasma (MEP) CVD in various inert-gas/methane mixture. The deposition rates, mechanical properties and optical of the DLC films as a function of bias voltages and inert-gas/methane ratios are studies, and effects of He, NE and Ar are compared.
DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
Nanyang Technological University