Development, processing and characterization of advanced polymer thin and ultra thin film systems for semiconductor manufacturing and optoelectronic devices
Date of Issue2000
School of Materials Science and Engineering
The project aimed at investigating both generic and unique characteristics concerning functional organic and polymeric thin films. One of the goals was capability development in the related topics ranging from processing or deposition techniques, to the fundamental chemical, physical and engineering aspects of these thin film materials. Systematic characterization of optical and electronic properties of the polymeric/organic thin films and fabrication of optoelectronic devices were carried out. The main objectives of the project were achieved in terms of (a)Development, modification and application of organic and polymer thin film deposition techniques,(b)Synthesis and processing of new functional materials,(c)Understanding the effect of chemical and morphological structures on the proper ties and performance of the thin films(d)Demonstration of potential applications of the thin films in photonic and electronic devices. Thin films based on small organic molecules, polymers and organic-inorganic hybrids were prepared and studied. Various film deposition techniques were studied and compared which include thermal evaporation, cold plasma polymerization, electrochemical deposition and more conventional solution based coating methods. For the chemistry viewpoint, the synthetic methods studied include conventional organic chemical synthesis, electrochemical synthesis, sol gel synthesis and plasma synthesis.