Rare earth materials for nanoelectronic applications.
Lee, Pooi See.
Date of Issue2007
School of Materials Science and Engineering
This report details the workdone on using rare earth materials for nanoelectronics applications. The aspects covered include formation of rare earth oxides for thin gate dielectrics, formation of rare earth based nanocrystals into rare earth oxides. The second part deals with the formation of rare earth Ni alloy nanowires and rare earth Er Silicide for device applications. This work shows the importance of rare earth materials in nanoelectronic devices and challenges the materials integration into conventional electronic materials systems.
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Nanoelectronics and interconnects