To establish a quality management system (QMS) for cleanroom wafer processes.
Mok, Hiang Teck.
Date of Issue1998
School of Mechanical and Aerospace Engineering
This report presents a discussion of the details and implementation of a Quality Management System (QMS) in a cleanroom which is used for processing wafers. The implementation of the QMS was carried out in a class 10 cleanroom and a class 10,000 cleanroom in the Institute of Microelectronics (IME) which is a Research and Development (R&D) institute under the Economic Development Board (EDB) of Singapore.